Simulation-​assisted De­sign and Cha­rac­te­riza­ti­on of Ab­ra­si­ve Ma­gne­tic Sus­pen­si­ons for High Pre­cis­i­on Fi­nis­hing - ChAM­Pion

Pro­ject sum­ma­ry

A com­mon pro­blem in mi­cro­sys­tems en­gi­nee­ring is the ma­nu­fac­tu­ring of parts with sur­faces of op­ti­cal qua­li­ty. In many mi­cro­sys­tem ap­p­li­ca­ti­ons, a na­no­metric sur­face rough­ness is cru­cial for the per­for­mance of the de­vice. Novel ma­nu­fac­tu­ring tech­ni­ques as e.g. rapid pro­to­typing, can pro­du­ce a va­rie­ty of com­plex geo­me­tries, how­e­ver, with very poor sur­face qua­li­ty. To en­able the ma­nu­fac­tu­ring of com­plex geo­me­tries with high pre­cis­i­on sur­faces, a novel fi­nis­hing tech­ni­que in­clu­ding custom-​designed sus­pen­si­ons is de­ve­lo­ped. The high qua­li­ty fi­nis­hing will be achie­ved by tailo­red nano-​abrasive ma­gne­torheo­lo­gi­cal flu­ids, con­troll­able by for­ces of ex­tern­al­ly in­du­ced ma­gne­tic fields. The pa­ra­me­ters for the de­sign of the sus­pen­si­ons will be de­ri­ved by a com­bi­ned nu­me­ri­cal and ex­pe­ri­men­tal ap­proach in ac­cordance with the de­si­red nano-​finishing qua­li­ty. The pro­ject will pro­vi­de a sound basis for fu­ture ICME ap­proa­ches em­ploy­ing tailor-​made sus­pen­si­ons in mi­cro­sys­tem ap­p­li­ca­ti­ons.